| 1 | Nikon is also reversing its losses in lithography. | |
| 2 | But with the development of technology, the cost of lithography equipment increases. | |
| 3 | Influences of side-wall slope of photolithography pattern on characteristic dimensions after ion implantation are analyzed. | |
| 4 | As well, how lithography-induced electrical issues manifest into timing and leakage power issues is being studied. | |
| 5 | Several companies and research institutes are currently developing e-beam tools for direct write lithography and other niche applications. |
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